Kloe is democratising microtechnologies for breakthrough research and innovation. Microfabrication equipment has historically been expensive, complex and inaccessible to smaller labs and emerging industries. The global manufacturer and supplier offers a full range of photolithography machines engineered to deliver exceptional quality at a lower cost.
From direct laser writers and exposure-masking systems to mask aligners and high-resolution 3D printers, the product line is designed with distinct specificities. Semiconductor, micromechanics, photonics, microfluidics, and more industries benefit from these compact, plug-andplay products, which make microtechnology accessible to a broader community.
“We have consistently based our designs on bold and forward-thinking choices, enabling the development of versatile products while maintaining high-end performance,” says Dr. Paul Coudray, president.
Trusted by global researchers and organisations, including NASA, Kloe’s advanced solutions are installed in over 50 countries across five continents. They are supported by a network of specialised distributors with local expertise to solve the evolving needs of their customers.
Elevating Research with Advanced Photolithography
Coudray’s journey to democratising high-resolution photolithography began with the development of Dilase 750, a versatile direct laser writer. Over the years, he expanded the Dilase range, offering a comprehensive suite of maskless solutions.
But, direct laser writing proved too complex for microfluidics, an emerging field with growing research demands. Kloe introduced the UV-KUB 2, the first UV LEDbased masking technology, marking a significant advancement in the field. The compact and cost-effective solution provides precise UV exposure without the drawbacks of traditional mercury lamps. UV-KUB 2 positioned Kloe at the forefront of mercury-free lithography long before environmental regulations steered the industry in that direction.
As microfluidics research advanced, the demand for multilevel patterning grew. Researchers sought an alignment function to enable more complex structures. Kloe developed UV-KUB 3, the first UV LED based mask aligner, combining submicronic resolution patterning (without vaccum contact) and high precision alignment and LED technology. It sets a new standard in mask aligners with a touchscreen interface, an embedded computer and advanced collimation technology.
User safety remained a priority as Kloe innovated with the UV-KUB series. Its products are fully enclosed with automated safety mechanisms that turn off the light when the chamber opens. The design ensures safety, unlike other UV LED-based systems that expose users to high-intensity UV radiation.
The UV-KUB 3 mask aligner is trusted by some of the world’s most demanding institutions, including NASA, which has qualified and adopted it for its applications. Meeting NASA’s stringent requirements marks a significant milestone and cements its position as a leader in next-generation photolithography solutions.
Why Advanced Mask Aligners Lead the Way
Kloe fine-tunes its mask aligners to deliver unmatched collimation and resolution.
Jenoptik AG (ETR: JEN), headquartered in Jena, Germany, is a leading global technology company specializing in the photonics market. Since its establishment in 1991, the company has evolved into a key player in optical technologies, providing solutions across various industries, including semiconductor equipment, automotive, medical technology, defense, security, and aviation. With a strong focus on innovation, Jenoptik has positioned itself as a critical supplier of cutting-edge optical and photonic systems. The company’s operations are structured into three primary divisions: Light & Optics, Light & Production, and Light & Safety. Each division leverages optical technologies to develop and deliver high-quality solutions tailored to industry-specific needs. This structured approach allows Jenoptik to focus on its core competencies while expanding its influence in rapidly growing markets. In the fiscal year 2023, Jenoptik demonstrated robust financial performance, reporting revenues of €1,066 million, marking a significant increase compared to previous years. This growth was primarily driven by its photonics business, particularly in the semiconductor equipment sector. The company also recorded an order intake of €1,092 million, reflecting strong demand across its core markets. As a testament to its strategic focus, Jenoptik has been investing heavily in research and development, ensuring it remains at the forefront of technological advancements. Dr. Stefan Traeger, who has been serving as Chairman of the Executive Board since May 1, 2017, has played a crucial role in Jenoptik’s success. Under his leadership, the company has strengthened its market position, expanded production capacities, and enhanced its innovation-driven strategy. Commenting on Jenoptik’s performance, Dr. Traeger states, “Jenoptik performed very well in the fiscal year 2023, with growth driven by its photonics business, especially in the semiconductor equipment sector.”
SÜSS MicroTec SE, headquartered in Garching near Munich, Germany, is a leading supplier of equipment and process solutions for microstructuring applications. With over 75 years of experience, the company has played a crucial role in the semiconductor industry, providing a wide range of products and solutions that support backend lithography, wafer bonding, and photomask processing. These technologies are vital for the manufacturing of processors, memory chips, microelectromechanical systems (MEMS), LEDs, and other components essential to modern electronics. The company’s origins date back to 1949 when it was founded by Karl Süss as Karl Süss KG. Initially distributing optical instruments like microscopes and cameras, its transformation into a semiconductor industry leader began in 1963 when Siemens requested the development of a simple photolithography device. This led to the creation of the first mask aligner, the MJB3, which became a cornerstone of SÜSS MicroTec’s future innovations. The company has since expanded its expertise and product portfolio, establishing itself as a global leader in microstructuring technology. Throughout its history, SÜSS MicroTec has consistently focused on innovation and strategic acquisitions to strengthen its market position. In 2010, it acquired Hamatech APE, a move that bolstered its capabilities in photomask processing technology. Two years later, the acquisition of Tamarack Scientific Co. Inc. added advanced laser processing technology for microstructure transfer to its portfolio. These acquisitions have helped the company meet the evolving demands of the semiconductor industry and broaden its technological capabilities. In recent years, SÜSS MicroTec has continued to evolve, adapting to changes in the global semiconductor market. A notable development took place in 2024 when its subsidiary, SÜSS MicroOptics, was acquired by Focuslight Technologies Inc., a Chinese company specializing in micro-optics solutions. This strategic decision reflects the dynamic nature of the industry and the company’s commitment to maintaining a competitive edge. Leadership transitions have also played a vital role in shaping the company’s direction. In September 2023, Burkhardt Frick was appointed as the CEO of SÜSS MicroTec SE, taking over from Dr. Bernd Schulte. Frick brought with him over 30 years of experience in the high-tech sector, along with extensive industry expertise and a strong network in key markets.
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Optical Micro-Electro-Mechanical Systems (MEMS) are highly integrated miniature devices that seamlessly combine mechanical
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Europe’s Mask Aligner Industry at the Forefront
Established in 1949, SUSS MicroTec has evolved into a prominent supplier of equipment and process solutions for the semiconductor industry. Headquartered in Garching near Munich, Germany, the company offers a comprehensive range of mask aligners tailored for both high-volume production and research environments. Their systems are renowned for superior quality, high alignment accuracy, and sophisticated exposure optics, catering to applications in 3D packaging, MEMS, LEDs, and nanotechnology.
France-based Kloe has positioned itself as a global player in photolithography technologies, manufacturing both direct laser writers and mask aligners. Their product line includes the UV-KUB series, which offers high-power density exposure systems and mask aligners suitable for various applications, from microfluidics to photonics. Kloe’s commitment to integrating traditional maskbased lithography with modern laser technologies underscores their innovative approach.
SPS-Europe provides a diverse array of mask aligners, ranging from 4-inch to 12-inch systems. Their offerings encompass manual, semi-automatic, and fully automatic systems, catering to varied substrate sizes and system types. This versatility ensures that both research institutions and production facilities can find solutions tailored to their specific needs.
Microptik specializes in high-accuracy mask aligners designed for photo mask and wafer alignment. Their systems feature precision optical alignment and non-contact mechanisms, minimizing potential damage during the alignment process. Products like the Non-Contact Aligner (MSMA-1200M) and the Desk Top Mask Aligner (MEMA-800) exemplify their commitment to precision and user-friendly design. Companies like Obducat collaborate with manufacturers such as Neutronix to offer a comprehensive range of mask aligners, ensuring that clients have access to tailored solutions for their specific requirements.
The European mask aligner manufacturing landscape is characterized by a blend of longstanding expertise and innovative approaches. Companies like SUSS MicroTec and Kloe exemplify this dynamic, offering diverse solutions that cater to both traditional and emerging applications in semiconductor fabrication. As the industry advances, these manufacturers continue to play a crucial role in shaping the future of photolithography and microfabrication.